Nano-processing with gas cluster ion beams
نویسندگان
چکیده
منابع مشابه
Molecular depth profiling with cluster ion beams.
Peptide-doped trehalose thin films have been characterized by bombardment with energetic cluster ion beams of C60+ and Aux+ (x = 1, 2, 3). The aim of these studies is to acquire information about the molecular sputtering process of the peptide and trehalose by measurement of secondary ion mass spectra during erosion. This system is important since uniform thin films of approximately 300 nm thic...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2000
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)01163-5